RF sputtering system can deposit thin layers of metals and non-metals onto a substrate.
Location: Manogatha, Workshop 3, Nila Campus
Model: AJA Orion 5
Equipment Capabilities:
VHV capability: 5×10−8 Torr.
Load lock chamber available.
Three target holders available.
Status of the Instrument : Active
Sample Submission Form (For internal Users)
Sample Submission Form (For External Users)